Determination of physical response in (Mo/ALN) saw devices

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Descripción: This paper describes the experimental conditions in surface acoustic wave (SAW) designed on aluminum nitride (AlN) films grown on Si3 N 4 substrates by using pulsed laser deposition. Moreover it was studied the dependency of optical properties with temperature of deposition. The thickness, measured by profilometry technology, was 150 nm for all films. Moreover, SAW devices with a Mo/AlN/Si3N4 configuration were fabricated employing AlN buffer and Mo Channel.
Citación recomendada (normas APA)
: Jaime Andrés; Caicedo Pérez Taborda, "Determination of physical response in (Mo/ALN) saw devices", -:Surface Review and Letters, Vol. 20, No. 2, 2013. Consultado en línea en la Biblioteca Digital de Bogotá (https://www.bibliotecadigitaldebogota.gov.co/resources/2084727/), el día 2025-05-10.

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